設(shè)備名稱(chēng) Equipment Name

管式PECVD設(shè)備  Horizontal PECVD

設(shè)備型號(hào) Equipment Model

PD-520/PD-520L/PD-520MAX

設(shè)備用途 Equipment Application

SiN、SiON等薄膜沉積。
Depositionof SiN, SiON ,etc.

技術(shù)特點(diǎn)  Features

1、可靠電極接觸，有效減少粉塵、降低高頻報(bào)警頻次。

Reliable electrode contact, effectively reduce dust as well as the frequency of high frequency alarms.

2、簡(jiǎn)單可靠自動(dòng)上下舟機(jī)構(gòu)，提升設(shè)備維護(hù)空間與便利。
Simple and reliable automatic boat loading/unloading unit improves themaintenance space and convenience of the equipment.

3、運(yùn)動(dòng)部件單面安裝維護(hù)，減少設(shè)備背靠背布局占地面積的同時(shí)不影響設(shè)備維護(hù)難度。
Single-sided installation and maintenance of moving parts,reducing the footprint of the back-to-back equipment without affecting the maintenance of the equipment.

4、高速平穩(wěn)整體模組推舟機(jī)構(gòu)。
High-speed and stable integral module boat pushing mechanism.

5、輔助加熱專(zhuān)利技術(shù)。
Auxiliary heating patent technology.

6、快速鍍膜工藝技術(shù)。
Rapid coating technology.

7、自主知識(shí)產(chǎn)權(quán)MES軟件、中央計(jì)算機(jī)集中控制系統(tǒng)。
MES software & CCC system with independent intellectual property rights.

設(shè)備參數(shù)  Parameters